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Feiyuan Group

Address:Qinghe Industrial Zone,Gaoqing County,Zibo City,Shandong Province ,China

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Fluorinated Fine Chemicals :Mr.Cheng(cell:13355298520)

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Nitrogen trifluoride(NF3)
Nitrogen trifluoride(NF3)
Products Details:

1. Description: 产品描述

Product description

Nitrogen trifluoride (NF3) is a colorless and stable gas under ambient conditions. The gas is incombustible but can support combustion. When the temperature is above 350, the gas will decompose slowly to produce fluorine of strong oxidation and therefore, it is a strong oxidant at high temperature

Typical technical data

Impurities

NF3≥99.995% Vol.%

NF3≥99.99% Vol.%

NF3≥99.98% Vol.%

NF3≥99.9% Vol.%

CF4

≤20 Vol.ppm

≤40 Vol.ppm

≤100 Vol.ppm

≤500 Vol.ppm

N2

≤5 Vol.ppm

≤5 Vol.ppm

≤10 Vol.ppm

≤50 Vol.ppm

O2+Ar

≤3 Vol.ppm

≤5 Vol.ppm

≤10 Vol.ppm

≤50 Vol.ppm

CO2

≤1 Vol.ppm

≤5 Vol.ppm

≤10 Vol.ppm

≤10 Vol.ppm

H2O

≤1 Vol.ppm

≤1 Vol.ppm

≤1 Vol.ppm

≤1 Vol.ppm

HF

≤1 Vol.ppm

≤1 Vol.ppm

≤1 Vol.ppm

≤1 Vol.ppm

SF6

≤1 Vol.ppm

≤2 Vol.ppm

≤2 Vol.ppm

≤25 Vol.ppm

N2O

≤1 Vol.ppm

≤5 Vol.ppm

≤10 Vol.ppm

≤10 Vol.ppm

CO

≤0.5 Vol.ppm

≤5 Vol.ppm

≤10 Vol.ppm

≤10 Vol.ppm

Physical property

molecular weight

melting point

boiling point

critical temperature

critical pressure

density of liquid

gas density

Water solubility

CAS  NO.

hazard categories

71.01

-206.8

-129

-39.3

44.02atm(4.46MPa)

1554kg/m3(1atm)

2.95kg/m3(1atm 21℃)

1.43*10-5(1atm22)

7783-54-2

Class 2.3

Applications

Nitrogen trifluoride (NF3) has been widely used in electronic industry,  semiconductor and solar photoelectricity industry etc. It’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.

 

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